Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by Crossref.
Caster, Allison G.
Kowarik, Stefan
Schwartzberg, Adam M.
Leone, Stephen R.
Tivanski, Alexei
and
Gilles, Mary K.
2010.
Quantifying reaction spread and x-ray exposure sensitivity in hydrogen silsesquioxane latent resist patterns with x-ray spectromicroscopy.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena,
Vol. 28,
Issue. 6,
p.
1304.