Hostname: page-component-78c5997874-g7gxr Total loading time: 0 Render date: 2024-11-20T02:48:06.083Z Has data issue: false hasContentIssue false
  • English
  • Français

Understanding and Tailoring the Mechanical Properties of Liga Fabricated Materials

Published online by Cambridge University Press:  10 February 2011

T. E Buchheit ,
T. R. Christenson ,
D. T. Schmale  and
D. A. Lavan
T. E Buchheit
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0333
T. R. Christenson
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0333
D. T. Schmale
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0333
D. A. Lavan
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0333
Get access

Abstract

LIGA fabricated materials and components exhibit several processing issues affecting their metallurgical and mechanical properties, potentially limiting their usefulness for MEMS applications. For example, LIGA processing by metal electrodeposition is very sensitive to deposition conditions which causes significant processing lot variations of mechanical and metallurgical properties. Furthermore, the process produces a material with a highly textured lenticular microstructural morphology suggesting an anisotropic material response. Understanding and controlling out-of-plane anisotropy is desirable for LIGA components designed for out-of-plane flexures. Previous work by the current authors [6] focussed on results from a miniature servo-hydraulic mechanical test frame constructed for characterizing LIGA materials. Those results demonstrated microstructural and mechanical properties dependencies with plating bath current density in LIGA fabricated nickel (LIGA Ni). This presentation builds on that work and fosters a methodology for controlling the properties of LIGA fabricated materials through processing. New results include measurement of mechanical properties of LIGA fabricated copper (LIGA Cu), out-of-planeand localized mechanical property measurements using compression testing and nanoindentation of LIGA Ni and LIGA Cu.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 546: Symposium AA – Materials Science of Microelectromechanical Systems (MEMS)… , 1998 , 121
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Becker, E.W., Ehrfled, W., Hagmann, P., Maner, A, and Munchmeyer, D., Microelectronic Eng., 4, pp 35–56 Google Scholar
2. Christenson, T.R. and Guckel, H. in Micromahcing in and Microfabrication Process Technology (SPIE Proceedings, 2639, Austin, Tx, 1995) pp. 134–145.Google Scholar
3. Whitehurst, M.L. in Symposium on Electrodeposited Metals as Materials for Selected Applications (MCIC-72- 05 report for Metals and Ceramics Information Center, Airforce Materials Laboratory, 1972), pp. 53–64.Google Scholar
4. Safranek, W. H., The Properties of Electrodeposited Metals and Alloys, (American Electroplaters and Surface finishers Society, Orlando Fl, 1986.Google Scholar
5. Schmale, D.T., Bourcier, R.J. and Buchheit, T.E., Description of a Micromechanical Testing System, SAND97-1608 (Sandia National Laboratories, Albuquerque, NM, 1997)Google Scholar
6. Christenson, T.R., Buchheit, T.E., Schmale, D.T. and Bourcier, R.J. in Microelectromechanical Structures for Materials Research (Mater. Res. Soc. Proc.) to be published.Google Scholar
7. Oliver, W.C. and Pharr, G.M., J. Mater. Res., 7, pp. 1564–1583, (1992).Google Scholar