An application of the nuclear kinematics selective reaction is the usage of the recoil nuclear reaction in generating radioactive ion beams which may de used for MEMS and fine machinery parts labeling used for ultra thin layer activation techniques. The classical Thin or Ultra Thin Layer method relies in creation of a very thin layer on the technologic surface that to exhibit radioactivity of short life radioisotopes. For classical material loss applications concentrations of the order of ppb of different material generated by nuclear reaction were offering plenty of gamma or X radiation to be easily detected over the natural background level directly by a radiation gauge placed above the entire functional mechanism, or by accumulating these in the third tribologic medium – a lubricant or a fluid. In the case of MEMS devices the material concentrations are required to be high enough in order to produce a good radioactive signal or other methods based on resonant energies on isotopic materials may be used such as particle activated prompt gamma, connected with the possibility of the MEMS device of removing from the spot of the dislocated material that becomes technologically useless but carrying out tracer material. There are various possibilities of applying tracer materials on the MEMS devices in order to clearly determine in-situ and in operation the material loss and to correlate with the operation regime.