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Two-View Small-Angle Wedge Sample Preparation By Hand Tools For Transmission Electron Microscopy Of Semiconductors And Related Materials

Published online by Cambridge University Press:  10 February 2011

Suli Suder ,
C. A. Faunce  and
S. E. Donnelly
Suli Suder
Affiliation:
Joule Physics Laboratory, Science Research Institute, University of Salford, Manchester M54WT, U.K.
C. A. Faunce
Affiliation:
Joule Physics Laboratory, Science Research Institute, University of Salford, Manchester M54WT, U.K.
S. E. Donnelly
Affiliation:
Joule Physics Laboratory, Science Research Institute, University of Salford, Manchester M54WT, U.K.
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Abstract

Various small-angle wedge two-view samples have been prepared by a small-angle cleavage technique using hand tools and examined by transmission electron microscopy. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same TEM specimen grid allowing convenient examination in both views. Samples of Si3N4, Zr, Co and TiN/CN/TiN films deposited on Si, and He ion implanted Si prepared by this technique are shown to be suitable for analysis in the TEM.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 480: Symposium Z – Specimen Preparation for Transmission Electron Microscopy…IV , 1997 , 73
Copyright
Copyright © Materials Research Society 1997

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References

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