Hostname: page-component-78c5997874-4rdpn Total loading time: 0 Render date: 2024-11-20T03:28:07.120Z Has data issue: false hasContentIssue false
  • English
  • Français

A Two-Step Spacer Etch for High-Aspect-Ratio Gate Stack Process

Published online by Cambridge University Press:  14 March 2011

Chien Yu ,
Rich Wise  and
Anthony Domenicucci
Chien Yu
Affiliation:
IBM Microelectronics, Semiconductor Research & Development Center, East Fishkill, NY 12533
Rich Wise
Affiliation:
DRAM Development Alliance IBM/Infineon
Anthony Domenicucci
Affiliation:
IBM Microelectronics, Semiconductor Research & Development Center, East Fishkill, NY 12533
Get access

Abstract

A highly selective nitride etch was developed for gate stack spacer process in advanced memory programs. Based on methyl fluoride chemistry with better than 8:1 selectivity of nitride:oxide, this process exhibits minimal erosion to the underlying RTO thermal oxide for consistent diffusion ion-implant control. As the groundrule changed to 0.175um and below, a two-step etch scheme was employed to maintain the profile control in high-aspect-ratio structures. The stability and repeatability of the process is demonstrated in the SPC chart of the post etch FTA site measurement.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 611: Symposium C – Gate Stack & Silicide Issues in Silicon Processing , 2000 , C5.4.1
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCE

1. Wolf, S., in Silicon Processing for the VLSI Era, Vol. III (Lattice Press, 1995) pp.634 Google Scholar
2. Ichiki, T., Chinzei, Y., Horiike, Y., Shindo, H., Ikegami, N., m, Sekine, M., ‘Residence Time Effect on SiO2/Si Selective Etching in High Density Fluorocarbon Plasma’, 43th National Symposium, American Vacuum Society, Philadelphia, 1996 Google Scholar
3. Regis, J.M., Joshi, A.M., Lill, T., Yu, M., ‘Reactive Ion Etch of Silicon Nitride Spacer with High Selectivity to Oxide’, IEEE/SEMI Advanced Semiconductor Manufacturing Conference 1977, 252 Google Scholar