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Two-Photon Laser Micro-Nano Fabrication; Understanding from Single-Voxel Level

Published online by Cambridge University Press:  11 February 2011

Satoshi Kawata  and
Hong-Bo Sun
Satoshi Kawata
Affiliation:
Department of Applied Physics, Osaka University, Suita, Osaka, 565–0871, Japan
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Abstract

For laser nanofabrication using two-photon photopolymerization, a deep understanding of the nature of focal spots that are related to two-photon excitation is essential for achieving a high spatial resolution in three dimensions. Here we report the use of a technology we call ascending scan for characterizing the three-dimensional size and shape of single polymerization elements (voxels), and introduce several features of voxels that have not been fully noticed before. These findings are important for tailoring nanofeatures according to design.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 758: Symposium LL – Rapid Prototyping Technologies , 2002 , LL4.6
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

1. Maruo, S., Nakamura, O. and Kawata, S., Opt. Lett. 22, 132 (1997).Google Scholar
2. Maruo, S. and Kawata, S., J. IEEE MEMS 7, 411 (1998).Google Scholar
3. Sun, H. –B., Matsuo, S. and Misawa, H., Appl. Phys. Lett. 74, 86 (1999).Google Scholar
4. Cumpston, B. H., Ananthavel, S. P., Barlow, S., Dyer, D. L., Ehrlich, J. E., Erskine, L. L., Heikal, Ahmed A., Kuebuler, S. M., Lee, I. -Y. Sandy, Maugon, D. M., Qin, J., Rokel, H., Rumi, M., Wu, X., Marder, S. R. and Perry, J. W., Nature 398, 51 (1999).Google Scholar
5. Sun, H. -B., Kawakami, T., Xu, Y., Ye, J.-Y., Matuso, S., Misawa, H., Miwa, M., and Kaneko, R., Opt. Lett. 25, 1110 (2000).Google Scholar
6. Sun, H. -B., Xu, Y., Juodkazis, S., Sun, K., Watanabe, M., Nishii, J., Matsuo, S. and Misawa, H., Opt. Lett. 26, 325 (2001).Google Scholar
7. Sun, H. –B., Mizeikis, V., Xu, Y., Juodkazis, S., Ye, J. –Y., Matsuo, S. and Misawa, H., Appl. Phys. Lett. 79, 1 (2001).Google Scholar
8. Kawata, S., Sun, H. –B., Tanaka, T. and Takada, K., Nature 412, 667 (2001)Google Scholar
9. Tanaka, T., Sun, H. –B. and Kawata, S., Appl. Phys. Lett. 80, 312 (2002).Google Scholar
10. Belfield, K. D., Schafer, K. J., Liu, Y. U., Liu, J., Ren, X. B. and Van Stryland, E. W., J. Phys. Org. Chem, 13, 837 (2000).Google Scholar
11. Sun, H. –B., Tanaka, T., Takada, K. and Kawata, S., Appl. Phys. Lett. 79, 1411 (2001).Google Scholar
12. Sun, H. –B., Takada, K. and Kawata, S., Appl. Phys. Lett. 79, 3173 (2001).Google Scholar
13. Sun, H. -B., Tanaka, T. and Kawata, S., Appl. Phys. Lett. 80, 3673 (2002)Google Scholar
14. Sun, H. –B., Maeda, M., Takada, K., Chon, J., Gu, M. and Kawata, S., submitted.Google Scholar
15. Gu, M., Advanced Optical Imaging Theory (Springer, Heide lberg, 1999).Google Scholar