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TVS Measurements of Metal Ions in Low-k Dielectrics: Effect of H2O Uptake
Published online by Cambridge University Press: 01 February 2011
Abstract
Drift of metal ions in low-k dielectrics was investigated by Triangular Voltage Sweep (TVS) measurements on planar capacitors with different gate materials: Al, Ta, Ru, Ti, Cu, Pt and a-Si.
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- Copyright © Materials Research Society 2008
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