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Tungsten-Carbon Multiiayer System Studied with X-Ray Scattering

Published online by Cambridge University Press:  25 February 2011

J. B. Kortright  and
J. D. Denlinger
J. B. Kortright
Affiliation:
Center for X-ray Optics, Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
J. D. Denlinger
Affiliation:
Center for X-ray Optics, Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
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Abstract

The tungsten-carbon multilayer system has been studied using x-ray scattering techniques as a function of multilayer period and annealing. Grazing incidence x-ray scattering shows that interatomic arrangements in the W-rich layers depend strongly on their proximity to the interface with the C-rich layers. Amorphous interface layers are stabilized by intermixing of W and C during deposition into local structures similar to those in the tungsten carbides. Further intermixing and structural relaxation in the amorphous state occurs on annealing these structures. This interatomic structural interpretation is consistent with trends in the observed x-ray optical properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 103 , 1987 , 95
Copyright
Copyright © Materials Research Society 1988

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References

REFERENCES

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