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Tunable Dielectric Thin Films for HTS Microwave Applications

Published online by Cambridge University Press:  10 February 2011

B. H. Moeckly  and
Y. M. Zhang
B. H. Moeckly
Affiliation:
Conductus, Inc., 969 W. Maude Ave., Sunnyvale, CA 94086, [email protected]
Y. M. Zhang
Affiliation:
Conductus, Inc., 969 W. Maude Ave., Sunnyvale, CA 94086, [email protected]
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Abstract

SrTiO3 (STO) thin films are promising for a variety of applications requiring tunability. We describe the growth and characterization of STO thin films including their dielectric properties. We also present attempts at reducing the loss tangent of these films, and we discuss their integration with high-temperature superconductor (HTS) microwave filters for trimming purposes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 603: Symposium KK – Materials Issues for Tunable RF & Microwave Devices , 1999 , 45
Copyright
Copyright © Materials Research Society 2000

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