Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-26T22:25:57.025Z Has data issue: false hasContentIssue false
  • English
  • Français

Transparent Conductive Tin Doped Indium Oxide Thin Films with Silver Additive

Published online by Cambridge University Press:  21 March 2011

Annette Hultåker ,
Jun Lu ,
Eva Olsson ,
Gunnar A. Niklasson  and
Claes-Göran Granqvist
Annette Hultåker*
Affiliation:
Department of Materials Science, The Ångström Laboratory, Uppsala University, P O Box 534, SE-751 21 Uppsala, Sweden
Jun Lu
Affiliation:
Department of Materials Science, The Ångström Laboratory, Uppsala University, P O Box 534, SE-751 21 Uppsala, Sweden
Eva Olsson
Affiliation:
Department of Materials Science, The Ångström Laboratory, Uppsala University, P O Box 534, SE-751 21 Uppsala, Sweden
Gunnar A. Niklasson
Affiliation:
Department of Materials Science, The Ångström Laboratory, Uppsala University, P O Box 534, SE-751 21 Uppsala, Sweden
Claes-Göran Granqvist
Affiliation:
Department of Materials Science, The Ångström Laboratory, Uppsala University, P O Box 534, SE-751 21 Uppsala, Sweden
*
1Corresponding author: Phone: +46 18 471 31 32, Fax: +46 18 500 131, E-mail: [email protected]
Get access

Abstract

Thin films of intermixed layers of In2O3:Sn (denoted ITO) and silver were made by reactive dc magnetron sputtering. The silver to indium atomic ratio was 0 ≤ x ≥ 0.09 Films with x = 0.01 showed increased luminous transmittance Tlum after annealing at 100 or 200°C, whereas x > 0.01 yielded lowered Tlum. The optical properties could be reconciled with the Maxwell-Garnett effective medium theory assuming that a well-defined portion of the silver was occluded as spheroidal particles. Films with x ≤ 0.06 had enhanced electrical conductivity after annealing at 200 or 300°C. Transmission electron microscopy displayed columnar features whose character depended on x.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 666: Symposium F – Transport and Microstructural Phenomena , 2001 , F1.9
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Gordon, R. G., MRS Bull. 25, 52–57 (2000).Google Scholar
2. Suzuki, M., Maeda, Y. and Sawada, Y., Jpn. J. Appl. Phys. 37, 34–38 (1998).Google Scholar
3. Suzuki, T., Suzuki, M., Sawada, Y. and Matsushita, J.-I., Thermochim. Acta 352–353, 87–90 (2000).Google Scholar
4. Klöppel, A., Kriegseis, W., Meyer, B. K., Scharmann, A., Daube, C., Stollenwerk, J. and Trube, J., Thin Solid Films 365, 139–146 (2000).Google Scholar
5. Hultåker, A., Järrendahl, K., Granqvist, C.-G. and Niklasson, G. A., submitted to Thin Solid Films.Google Scholar
6. Kreibig, U., Appl. Phys. 10, 255–264 (1976).Google Scholar
7. Garnett, J. C. Maxwell, Philos. Trans. Roy. Soc. London, Series A 205, 237–288 (1906).Google Scholar
8. Kreibig, U. and Vollmer, M., Optical Properties of Metal Clusters, (Springer, Berlin Heidelberg, 1995) p. 146.Google Scholar
9. Gans, R., Ann. Physik, Leipzig, 37, 881–900 (1912).Google Scholar
10. Granqvist, C. G. and Hunderi, O., Phys. Rev. B 16, 3513–3534 (1977).Google Scholar
11. Euler, J., Z. Physik 137, 318–332 (1954).Google Scholar
12. Kreibig, U., Gartz, M., Hilger, A. and Neuendorf, R., NanoStructured Mater. 11, 1335–1342 (1999).Google Scholar
13. Ordal, M. A., Long, L. L., Bell, R. J., Bell, S. E., Bell, R. R., Alexander, R. W. Jr and Ward, C. A., Appl. Opt. 22, 1099–1119 (1983).Google Scholar
14. Winsemius, P., Kampen, F. F. van, Lengkeek, H. P. and Went, C. G. van, Handbook of Optical Constants of Solids, edited by Palik, E. D. (Academic, Orlando, 1985) pp. 355–357.Google Scholar
15. Nordling, C. and Österman, J., Physics Handbook (Studentlitteratur, Lund, 1982) pp. 29.Google Scholar
16. Wit, J. H. W. de, Sci. Ceram. 9, 143–150 (1977).Google Scholar
17.Ref. 8, pp. 187–201 Google Scholar
18. Anno, E. and Hoshino, R., J. Phys. Soc. Jpn. 51, 1185–1192 (1982).Google Scholar