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Transient current in a-Si:H-based MIS photosensors

Published online by Cambridge University Press:  01 February 2011

Miguel Fernandes
Affiliation:
[email protected], ISEL, DEETC, Rua Conselheiro Emidio Navarro, Lisbon, N/A, Portugal
Yuriy Vygranenko
Affiliation:
[email protected], ISEL, DEETC, Rua Conselheiro Emidio Navarro, Lisbon, 1959-007, Portugal
Manuela Vieira
Affiliation:
[email protected], ISEL, DEETC, Rua Conselheiro Emidio Navarro, Lisbon, 1959-007, Portugal
Gregory Heiler
Affiliation:
[email protected], Carestream Health Inc., 1049 Ridge Road West, Rochester, NY, NY 14615, United States
Timothy Tredwell
Affiliation:
Carestream Health Inc.1049 Ridge Road WestRochesterNYNY 14615United States
Arokia Nathan
Affiliation:
[email protected], UCL, London Centre for Nanotechnology, London, WC1H 0AH, United Kingdom
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Abstract

Large-area amorphous silicon (a-Si:H) sensor arrays are widely used for medical x-ray imaging, nondestructive testing and security screening. Most of the commercially available detectors are of the indirect conversion type, in which an x-ray phosphor screen is optically coupled to an array of a-Si:H sensors. The a-Si:H PIN photodiode and the MIS photoelectric converter are two alternative sensing elements used in these detectors. The major advantage of the MIS structure over PIN is fact that this device has the same layer sequence as the a Si:H TFT switch and therefore, they can be fabricated simultaneously resulting in an effective reduction in the lithography mask count. The main disadvantage of the MIS structure is the higher noise level due to transient dark current. The transient dark current originates from traps at the semiconductor-insulator interface and i-layer bulk defects. In this work we analyze the transient current transport in segmented-gate/SiN/a Si:H/n+/ITO structures under different biasing conditions and temperatures. Using a home-made setup the dark current decay was measured within an interval of 1 second in the temperature range from 294 to 353K. It is found that the dark current component associated with charge trapping at the insulator-semiconductor interface can be largely eliminated by adjusting the bias voltage during the refresh period. Under optimized biasing conditions and elevated temperatures the bulk current component becomes dominant.

Type
Research Article
Copyright
Copyright © Materials Research Society 2008

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References

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