Hostname: page-component-cd9895bd7-gxg78 Total loading time: 0 Render date: 2024-12-27T01:31:19.121Z Has data issue: false hasContentIssue false
  • English
  • Français

Transient Conductivity Measurements in Pulsed Ion Beam Melted Silicon

Published online by Cambridge University Press:  15 February 2011

R.M. Fastow ,
J. Gyulai  and
J.W. Mayer
R.M. Fastow
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, N.Y. 14853
J. Gyulai
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, N.Y. 14853
J.W. Mayer
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, N.Y. 14853
Get access

Abstract

A pulsed proton beam, ˜200 ns in duration, has been used to melt and regrow single crystal silicon. The protons had an energy of 300 kev, yielding a measured energy density of 0.8–2.0 J/cm2. The method of transient conductivity has been used to determine the melt depths, melt durations, and regrowth velocities. The measured values for 2.0 J/cm2 were, respectively, 1.7 μm, 2 μsec, and 1.4 m/sec.

Computer generated melt curves were compared to experiment with good agreement. The energy required to initiate melt was determined, and a linear dependence of melt depth with energy has been observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 13 , 1982 , 69
Copyright
Copyright © Materials Research Society 1983

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Footnotes

*

permanent address: Central Res. Inst. of Physics H-1525 Budapest

References

REFERENCES

1.Anderson, H.H., Ziegler, J.F., Hydrogen Stopping Power and Ranges in All Elements. vol 3 (Pergamon Press, New York 1977).Google Scholar
2.Baglin, J. and Hodgson, R., Proc. 5th Int. Conf. on Ion Beam Annealing(Sydney1981)Google Scholar
3.Baglin, J., Laser-Solid Interactions and Transient Processing of Materials (Elsevier Science Publishing Co., Inc., N.Y. 1983)Google Scholar
4.Galvin, G., Thompson, M., and Mayer, J.W., Physical Review Letters 48, 1, 33 (1982)Google Scholar
5.Galvin, G., Thompson, M., and Mayer, J.W., Physical Review B. (To be published)Google Scholar
6.Gyulai, J., Fastow, R., and Kavanagh, K.L., Laser-Solid Interactons and Transient Processing of Materials (Elesvier Science Publishing Co., Inc., N.Y. 1983)Google Scholar
7.Palmstrom, C., Fastow, R., and Mayer, J.W., Laser-Solid Interactions and Transient Thermal Processing of Materials (Elsevier Science Publishing Co., Inc., N.Y. 1983)Google Scholar
8.Thompson, M., Galvin, G., and Mayer, J.W., Laser and Electron-Beam Interactions with Solids (Elsevier Science Publishing Co., Inc., N.Y. 1982), pp. 209–214Google Scholar