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Trace Analysis of Nanoscale Materials by Analytical Electron Microscopy

Published online by Cambridge University Press:  21 February 2011

Dale E. Newbury  and
Richard D. Leapman
Dale E. Newbury
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Richard D. Leapman
Affiliation:
National Institutes of Health, Bethesda, MD 20892
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Abstract

Trace analysis of nanometer-scale objects can be performed with parallel-detection electron energy loss spectrometry in the analytical electron microscope. Spectra are collected in the second difference mode with the beam current chosen to maximize the spectral count rate. Numerous elements can be detected at trace levels below 100 parts per million atomic, including transition metal, alkali metal, alkaline earth, and rare earth elements, provided they have a “white line” resonance structure at the ionization edge. Trace nanoanalysis by AEM/PEELS permits direct examination of the microscopic distribution of trace constituents.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 332: Symposium U – Determining Nanoscale Physical Properties of Materials by Microscopy and Spectroscopy , 1994 , 287
Copyright
Copyright © Materials Research Society 1994

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References

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