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Towards a High Quality Factor DC Electric Field Switchable Barium Strontium Titanate Solidly Mounted Resonator

Published online by Cambridge University Press:  31 January 2011

George N. Saddik ,
Junwoo Son ,
Susanne Stemmer  and
Robert A. York
George N. Saddik
Affiliation:
[email protected], University of California Santa Barbara, Electrical and Computer Engineering, Santa Barbara, United States
Junwoo Son
Affiliation:
[email protected], University of California Santa Barbara, Materials, Santa Barbara, United States
Susanne Stemmer
Affiliation:
[email protected], University of California, Santa Barbara, Materials, Santa Barbara, California, United States
Robert A. York
Affiliation:
[email protected], University of California Santa Barbara, Electrical and Computer Engineering, Santa Barbara, United States
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Abstract

Barium strontium titanate solidly mounted resonators (SMR) were fabricated with three different acoustic Bragg reflectors (ABR) on a sapphire substrate. The three devices had ABR structures consisting of W/SiO2/W/SiO2, Mo/SiO2/Mo/SiO2, and Pt/SiO2/Pt/SiO2 respectively. The s-parameters of all three devices were measured. The results showed that the quality factor increased as a function of the material in the ABR structure. The quality factor for the devices with tungsten, molybdenum and platinum in the ABR structures are 101, 88, and 31, respectively. This investigation showed how the material in the ABR structure can contribute to the acoustic loss in the device.

Keywords

acousticferroelectricpiezoelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1199: Symposium F –Multiferroic and Ferroelectric Materials , 2009 , 1199-F06-16
Copyright
Copyright © Materials Research Society 2010

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