Hostname: page-component-cd9895bd7-gvvz8 Total loading time: 0 Render date: 2024-12-29T16:56:13.205Z Has data issue: false hasContentIssue false
  • English
  • Français

Torsional Micromirror Array Design for Optical Binary Switching and Amplitude Modulation Applications

Published online by Cambridge University Press:  10 February 2011

E.S. Kolesar ,
P.B. Allen ,
N.C. Boydston ,
J.T. Howard ,
S.Y. Ko  and
J.W. Wilken
E.S. Kolesar
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
P.B. Allen
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
N.C. Boydston
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
J.T. Howard
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
S.Y. Ko
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
J.W. Wilken
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129
Get access

Abstract

A torsional micromirror was designed and fabricated using a three-level, polysilicon, surface micromachined, microelectromechanical systems (MEMS) process. The torsional micromirrors have highly-reflective, gold-coated polysilicon optical surfaces. Electrostatically induced in-plane and outof-plane vertical deflections on the order of 2.75 νm were achieved. The modeling phase focused on the microdynamical behavior of the torsional micromirror. The IntelliCAD® finite element analysis program was used to generate a plot of the micromirror's deflection (d) versus applied direct current voltage (V). The data was least-squares fitted to the well-established V μ d3/2 relationship. A resonant frequency analysis predicted an approximate switching speed of 6 νsec. The relative reliability (number of operational cycles) of the torsional micromirror design was measured to exceed 2 million flexure events. The potential for using torsional micromirrors as binary optical switches and amplitude modulators is addressed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 205
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Yao, Z.J. and MacDonald, N.C., Opt. Eng. 8, 1408 (1997).Google Scholar
2. Hornbeck, L.J., Proc. SPIE, vol. 2783, p. 2 (1996).Google Scholar
3. Boysel, R.M, MacDonald, T.G., Magel, G.A., Smith, G.C. and Leonard, J.L., Proc. SPIE, vol. 1793, p. 34 (1992).Google Scholar
4. Toshiyoshi, H. and Fuijita, H., J. Microelectromechanical Systems 5, 231 (1996).Google Scholar
5. Ikeda, M., Goto, H., Sakata, M., Wakabayashi, K.I., Takeuchi, M. and Yada, T., Proc. SPIE, vol. 2328, p. 118 (1996).Google Scholar
6. Comtois, J.H., Bright, V.M., Gustafson, S.C. and Michalicek, M.A., Proc. SPIE, vol. 2741, p. 76 (1995).Google Scholar
7. Horner, K.A., Haluf, N.I., Martinez, E. and Kovacs, G.T.A., Proc. Transducers '95, p. 308 (1995).Google Scholar
8. Markus, K.w and Koester, D.A., “Multi-User MEMS ProcesS (MUMPS) introduction and design rules,” MCNC Electronics Technology Division, 3021 Cornwallis Road, Research Triangle Park, North Carolina, 1996.Google Scholar
9. Sandmaier, H., Offereins, H.L. and Folkmer, B., J. Micromech. Microeng. 3, 103 (1993).10.1088/0960-1317/3/3/001Google Scholar
10.IntelliCAD® User's Manual, version 2.0.14, 1995, IntelliSense Corporation, Wilmington, MA.Google Scholar
11. Mullen, R.L., Mehregany, M., Omar, M.P. and Ko, W.H., Proc. IEEE MicroElectroMech. Sys. Conf., p. 154 (1991).Google Scholar
12. Hornbeck, L.J., SPIE Critical Review, vol. 1150, p. 86 (1990).Google Scholar
13. Michalicek, M.A., Sene, D.E. and Bright, V.M., Proc. Int. Conf. Integrated Micro/Nanotechnology for Space Applications, p. 214 (1995).Google Scholar
14. Yang, Y.J. and Senturia, S.D., Tech. Dig. Solid-State Sensor and Actuator Workshop, p. 76 (1996).Google Scholar