Hostname: page-component-cd9895bd7-q99xh Total loading time: 0 Render date: 2024-12-27T02:18:58.445Z Has data issue: false hasContentIssue false
  • English
  • Français

Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique

Published online by Cambridge University Press:  12 January 2012

Linzi E. Dodd ,
Andrew J. Gallant  and
David Wood
Linzi E. Dodd
Affiliation:
School of Engineering and Computing Sciences, Durham University Science Laboratories, South Road, Durham, DH1 3LE, United Kingdom
Andrew J. Gallant
Affiliation:
School of Engineering and Computing Sciences, Durham University Science Laboratories, South Road, Durham, DH1 3LE, United Kingdom
David Wood
Affiliation:
School of Engineering and Computing Sciences, Durham University Science Laboratories, South Road, Durham, DH1 3LE, United Kingdom
Get access

Abstract

This work presents the successful production, via a simple oxidation process, of Ti-TiOx-Pt Metal-Oxide-Metal diodes with excellent electrical asymmetry. TEM analysis has been used to verify the oxide thickness. A thicker layer produces better diodes, although they are of a less uniform nature. The conduction mechanism in these diodes is still under investigation.

Keywords

electrical propertiesoxidemicrostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1415: Symposium HH/II/TT – MEMS, BioMEMS and Bioelectronics–Materials and Devices , 2012 , mrsf11-1415-tt04-06
Copyright
Copyright © Materials Research Society 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Bean, J. A., Weeks, A. and Boreman, G. D., “Performance optimization of antenna-coupled Al/AlOx/Pt tunnel diode infrared detectors”, IEEE J. Quantum Electron. 47, 126-135, (2011)Google Scholar
2. Dagenais, M., Choi, K., Yesilkoy, F., Chryssis, A. N. and Peckerar, M. C., “Solar spectrum rectification using nano-antennas and tunneling diodes”, Optoelectronic Integrated Circuits, San Francisco, USA, January 27-28, 2010, Proc. SPIE 7605, 76050E, (2010)Google Scholar
3. Alda, J., Rico-García, J. M., López-Alonso, J. M. and Boreman, G., “Optical antennas for nano-photonic applications”, Nanotechnology, 16, S230–S234, (2005)Google Scholar
4. Stabler, F., “Automotive thermoelectric generators: design & manufacturing”, Proc. MRS Spring Meeting, San Francisco, USA, April 13-17, 2009, Symposium N: Materials and Devices for Thermal-to-Electric Energy Conversion Google Scholar
5. Evenson, K. M., Jennings, D. A. and Peterson, F. R., “Tunable far-infrared spectroscopy”, Appl. Phys. Lett., 44, 576–578, (1984)Google Scholar
6. Kwok, S. P., Haddad, G. I. and Lobov, G., “Metal-Oxide-Metal (M-O-M) Detector”, J Appl. Phys., 42, 554–563, (1971)Google Scholar
7. Dodd, L. E., Wood, D. and Gallant, A. J., “Optimizing MOM Diode Performance via the Oxidation Technique”, Proc. IEEE Sensors 2011, Limerick, Ireland, 28-31 October, 2011, 176–179 Google Scholar
8. Tiwari, B., Bean, J. A., Szakmany, G., Bernstein, G. H., Fay, P. and Porod, W., “Controlled etching and regrowth of tunnel oxide for antenna-coupled metal-oxide-metal diodes”, J Vac. Sci. Technol., 27, 2153–2160, (2009)Google Scholar