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Titania/Silica Sol-Gel Films: Comparison of Techniques for Thin Film Thickness Measurement

Published online by Cambridge University Press:  28 February 2011

S. M. Melpolder ,
A. W. West ,
M. P. Cunningham  and
R. Sharma
S. M. Melpolder
Affiliation:
Eastman Kodak Company,Rochester,New York,14650–2019.
A. W. West
Affiliation:
Eastman Kodak Company,Rochester,New York,14650–2019.
M. P. Cunningham
Affiliation:
Eastman Kodak Company,Rochester,New York,14650–2019.
R. Sharma
Affiliation:
Eastman Kodak Company,Rochester,New York,14650–2019.
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Abstract

Two techniques for thin film measurement were compared: an optical method combining ellipsometry and reflectance spectroscopy, and cross-sectional transmission electron microscopy. These techniques were used to measure the absolute thicknesses of titania/silica sol-gel films in the size range 0.1 to 0.8 microns. The relative advantages and disadvantages of these methods will be described in this study.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 387
Copyright
Copyright © Materials Research Society 1990

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References

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