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Time, Temperature and Strain Relaxation during Fabrication of Strained Heterostructures

Published online by Cambridge University Press:  28 February 2011

J.Y. Tsao  and
B.W. Dodson
J.Y. Tsao
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-5800
B.W. Dodson
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-5800
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Abstract

We present a simple example of the time evolution of temperature, excess stress and strain relaxation during growth and subsequent annealing of strained heterostructures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 160 , 1989 , 17
Copyright
Copyright © Materials Research Society 1990

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References

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