Hostname: page-component-745bb68f8f-b95js Total loading time: 0 Render date: 2025-01-28T23:12:32.485Z Has data issue: false hasContentIssue false
  • English
  • Français

Three Dimensional Simulation of the Morphological Evolution of a Strained Film on a Thick Substrate

Published online by Cambridge University Press:  10 February 2011

Cheng-hsin Chiu
Cheng-hsin Chiu*
Affiliation:
Institute of Materials Research and Engineering, Blk S7 Level 3, National University of Singapore, Singapore119260
Get access

Abstract

This paper presents a three-dimensional simulation for the surface evolution of a strained film on a thick substrate. The simulation shows that an initially random morphology will first transform into a profile dominated by two-dimensional ridges, and then into a three-dimensional island surface. The simulation also demonstrates that the ridge-island transition is a kinetic process which can be delayed by changing the initial morphology.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 529: Symposia BB – Computational & Mathematical Models of Microstructural Evolution , 1998 , 125
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Eaglesham, D. J. and Cerullo, M., Phys. Rev. Lett. 64, 1943 (1990).Google Scholar
[2] Cullis, A. G., MRS Bulletin 21, 21 (1996).Google Scholar
[3] Ozkan, C. S., Ph.D. dissertation, Stanford University (1996).Google Scholar
[4] Tersoff, J. and LeGoues, R K., Phys. Rev. Lett. 72, 3570 (1994).Google Scholar
[5] Bimberg, D., Grundmann, M., and Ledentsov, N. N., MRS Bulletin 23 No. 2, 31 (1998).Google Scholar
[6] Asaro, R. J. and Tiller, W. A., Metall. Trans. 3, 1789 (1972).Google Scholar
[7] Srolovitz, D. I., Acta metall. 37, 621 (1989).Google Scholar
[8] Gao, H., Int. J. Solids Structures 28, 703 (1991).Google Scholar
[9] Spencer, B. J., Voorhees, P. W., and Davis, S. H., Phys. Rev. Lett. 67, 3696 (1991).Google Scholar
[10] Grinfeld, M. A., J. Nonlinear Sci. 3, 35 (1993).Google Scholar
[11] Freund, L. B. and Jonsdottir, F., J. Mech. Phys. Solids 41, 1245 (1993).Google Scholar
[12] Guyer, J. E. and Voorhees, P. W., Phys. Rev. Lett. 74, 4031 (1995).Google Scholar
[13] Chiu, C.-h., and Freund, L. B., Morphological instability of a strained film on a compliant substrate. Manuscript in preparation.Google Scholar
[14] Chiu, C-h. and Freund, L. B., In Thin Films: Stresses and Mechanical Properties VI, eds. Gerberich, W. W., Gao, H., Sundgren, J.-E., and Baker, S. P., MRS Sym. Proc. 436, 517 (1996).Google Scholar
[15] Kukta, R. V. and Freund, L. B., ibid, 493 (1996).Google Scholar
[16] Spencer, B. J. and Tersoff, J., Phys. Rev. Lett, in press.Google Scholar
[17] Chiu, C-h. and Gao, H., Int. J. Solids Structures 30, 2983 (1993).Google Scholar
[18] Yang, W. H. and Srolovitz, D. J., Phys. Rev. Lett. 71, 1593 (1993).Google Scholar
[19] Chiu, C.-h. and Gao, H., In Mechanisms of Thin Film Evolution, eds. Yalisove, S. M., Thompson, C. V., and Eaglesham, D. J., MRS Symp. Proc. 317, 369 (1994).Google Scholar
[20] Jonsdottir, F and Freund, L. B., ibid, 309 (1994).Google Scholar
[21] Freund, L. B., Acta Mech. Sinica 10, 16 (1994).Google Scholar
[22] Spencer, B. J. and Meiron, D. I., Acta metall. 42, 3629 (1994).Google Scholar
[23] Freund, L. B., Int. J. Solids Structures 32, 911 (1995).Google Scholar
[24] Chiu, C.-h. and Gao, H., In Thin Films: Stresses and Mechanical Properties V eds. Baker, S. P., Ross, C. A., Townsend, P. H., Volkert, C. A., and Borgesen, P., MRS Symp. Proc. 356, 33 (1995).Google Scholar
[25] Chiu, C-h., Ph.D. dissertation, Stanford University (1995).Google Scholar
[26] Gao, H., J. Mech. Phys. Solids 42, 741 (1994).Google Scholar
[27] Mullins, W. W., J. AppL. Phys. 28, 333 (1957).Google Scholar
[28] Weatherburn, M. A., Differential Geometry of Three Dimensions, Cambridge University Press, London (1927).Google Scholar
[29] Chiu, C-h., High-order boundary perturbation analysis for three-dimensional elasticity problems and its application in simulating the surface evolution of a strained film. Manuscript in preparation.Google Scholar
[30] This can be understood from the first-order perturbation result [6–9]; this is also indicated in our simulation that both the ridges and the islands can grow during the evolution.Google Scholar