Hostname: page-component-cd9895bd7-7cvxr Total loading time: 0 Render date: 2024-12-27T01:34:47.609Z Has data issue: false hasContentIssue false
  • English
  • Français

Thin Films of Uniform Thickness by Pulsed Laser Deposition

Published online by Cambridge University Press:  16 February 2011

K. B. Erington  and
N. J. Ianno
K. B. Erington
Affiliation:
Center for Microelectronic and Optical Materials Research, Dept. of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588.
N. J. Ianno
Affiliation:
Center for Microelectronic and Optical Materials Research, Dept. of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588.
Get access

Abstract

In order to enhance the utility of Pulsed Laser Deposition (PLD), a method to deposit uniform films has been devised. This method employs the deposition profile produced by PLD and the discrete nature of the process. We have simulated this process using experimentally determined deposition profiles and have used the results to design a system that produces films of uniform thickness to within a few percent across a substrate of 1 inch diameter and have obtained excellent agreement between theory and experiment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 191: Symposium N – Laser Ablation for Materials Synthesis , 1990 , 115
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Lynds, L., Weinburger, B. R., Peterson, G. G., and Krasinski, H. A., Appl. Phys. Lett. 52, 320 (1980).Google Scholar
2. Kim, B. F., Bohandy, J., Agostinelli, E., Phillips, T. E., Green, W. J., Adrean, F. J., and Moorjani, K., in Science and Tech. of Thin Film Superconductors, edited by McConnel, R. D. and Wolf, S.A. (Plenum Press, New York, 1989), p. 27.Google Scholar
3. Liou, S. H., Ianno, N. J., Johs, B., Thompson, D., Meyer, D., and Woollam, J. A., in Science and Tech. of Thin Film Superconductors, edited by McConnel, R.D. and Wolf, S. A. (Plenum Press, New York, 1989), p. 35.Google Scholar
4. Sankur, H., Gunning, W. J., DeNatale, J., and Flintoff, J. F., J. Appl. Phys. 65, 2475 (1989).Google Scholar
5. Pekny, T. and Ianno, N. J., unpublished results.Google Scholar
6. Erington, K.B. and Ianno, N.J., submitted, J. Vac. Sci. and Tech.Google Scholar