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Thin Film Silicon Power Modules: Challenges and Opportunities for Materials Science
Published online by Cambridge University Press: 28 February 2011
Abstract
A survey of the materials issues involved in the development of thin film Si:H power modules is presented. Though there are significant opportunities for advancement of Si:H itself, especially in terms of new alloys, the range of opportunities is extended dramatically when all aspects of the product -- from gaseous fuels through encapsulants -- are included. Examples from each of these areas are presented to Indicate the current state of development as well as the needs for the future. Viable products exist today, but the extent of greater success depends critically on materials innovation.
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- Copyright © Materials Research Society 1985