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Thin Film Formation of Transparent Conductive Oxides by Solution-Based Mist Deposition Method toward Hybrid Device Applications
Published online by Cambridge University Press: 24 January 2012
Abstract
Transparent conductive oxides, gallium-doped zinc oxide (ZnO:Ga) and tin-doped indium oxide (ITO), were fabricated by a solution-based ultrasonic spray-assisted mist deposition technique. The ZnO:Ga films showed a good c-axis orientation perpendicular to the substrate and achieved low resistivity of 2.3 × 10-3 Ω cm with high transmittance in wide wavelength region. ITO films have lower resistivity of 1.4 × 10-4 Ω cm and high transmittance over the wavelength of 300 nm.
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- Copyright © Materials Research Society 2012
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