Hostname: page-component-586b7cd67f-dsjbd Total loading time: 0 Render date: 2024-11-29T07:44:02.222Z Has data issue: false hasContentIssue false
  • English
  • Français

Thin Film Fine Line Work of Adhesion by Microwedge Indentation

Published online by Cambridge University Press:  21 February 2011

M. P. de Boer ,
N. R. Moody ,
H Huang  and
W.W. Gerberich
M. P. de Boer
Affiliation:
Dept. of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
N. R. Moody
Affiliation:
Sandia National Laboratory, Livermore, CA 94551
H Huang
Affiliation:
Dept. of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
W.W. Gerberich
Affiliation:
Dept. of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
Get access

Abstract

The mechanics for plane strain geometry are presented for thin film fine lines by considering the case of microwedge indentation of a fine line subject to no residual stress. The analysis is separated into three parts depending on the absence or presence of buckling. During indentation, unbuckled or double-buckled configurations may exist, while single-buckling may occur when the indenter tip is removed. A microwedge tip was employed in the indentation testing of unstressed rf-sputtered tungsten fine lines to demonstrate some of the analysis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 693
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Evans, A. G. and Hutchinson, J. W., Int. J. Solids Struct. 20, 455 (1984).Google Scholar
2. Marshall, D. B. and Evans, A. G., J. Appl. Phys., 56 (10), 2632 (1984).Google Scholar
3. Rosenfeld, L. G., Ritter, J. E., Lardner, T. J., and Lin, M. R., J. Appl. Phys. 67 (7), 3291 (1990).Google Scholar
4. Pethica, J. R., Hutchings, R., and Oliver, W. C., Philos. Mag. A 48, 593 (1983).Google Scholar
5. Wu, T. W., J. Mater. Res. 6, 407 (1991).Google Scholar
6. Ewalds, H. L. and Wanhill, R. J. H., in Fracture Mechanics. (Edward Arnold, Delftse Uitgevers Maatschappij, 1991) p. 82.Google Scholar
7. Thouless, M. D., Evans, A. G., Ashby, M. F., and Hutchinson, J. W., Acta Metall. 35, 1333 (1987).Google Scholar
8. Rice, J. R., J. Appl. Mech., 55, 98 (1988).Google Scholar
9. Charalambides, P. G., Lund, J., Evans, A. G. and McMeeking, R. M., AMSE J. Appl. Mech., 56, 98 (1988).Google Scholar
10. Hibbitt, Karlsson and Sorensen, Inc., ABAOUS USER’S Mannual V. 5.2, (1992).Google Scholar
11. Cao, H. C. and Evans, A. G., Mechanics of Materials 7, 295 (1989).Google Scholar
12. Oliver, W. C. and Pharr, G.M., J. Mater. Res. 7 (6), 1564 (1992).Google Scholar