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Thermomodulated Reflectivity Spectra of Gan/Sapphire Epilayer
Published online by Cambridge University Press: 15 February 2011
Abstract
Thermomodulation spectra from the metalorganic chemical vapor deposition (MOCVD) grown GaN have been measured in the temperature range 20 K - 310 K. A theoretical model is established to explain the modulation spectrum by considering the modulation of epilayer thickness and dielectric constant. By performing the lineshape analysis, the bandgap energy and broadening parameter were determined in the temperature range. The nonlinear temperature coefficient (Varshni coefficient) of energy gap is measured to be 5.9×10−4 eV/K. The temperature dependence of broadening parameter is also measured for the first time.
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