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Thermodynamics, Kinetics and Interface Morphology of Reactions Between Metals and GaAs

Published online by Cambridge University Press:  25 February 2011

Jen-Chwen Lin  and
Y. Austin Chang
Jen-Chwen Lin
Affiliation:
University of Wisconsin-Madison, Department of Materials Science and Engineering, 1509 University Avenue, Madison, WI 53706, USA
Y. Austin Chang
Affiliation:
University of Wisconsin-Madison, Department of Materials Science and Engineering, 1509 University Avenue, Madison, WI 53706, USA
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Abstract

The chemical stability of interfaces between metals and GaAs was discussed in terms of reaction sequence and diffusion path concepts. The factors which determine interface morphology were also given. These general ideas can be applied to any interfacial reactions between two dissimilar materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 148: Symposium D – Chemistry and Defects in Semiconductor Heterostructures , 1989 , 3
Copyright
Copyright © Materials Research Society 1989

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