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Thermocapillary Patterning of Nanoscale Polymer Films

Published online by Cambridge University Press:  31 January 2011

Mathias Dietzel  and
Sandra M Troian
Mathias Dietzel
Affiliation:
[email protected], California Institute of Technology, Applied Physics, Pasadena, California, United States
Sandra M Troian
Affiliation:
[email protected], California Institute of Technology, Applied Physics, Pasadena, California, United States
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Abstract

We investigate a method for non-contact patterning of molten polymer nanofilms based on thermocapillary modulation. Imposed thermal distributions along the surface of the film generate spatial gradients in surface tension. The resulting interfacial stresses are used to shape and mold nanofilms into 3D structures, which rapidly solidify when cooled to room temperature. Finite element simulations of the evolution of molten shapes illustrate how this technique can be used to fabricate features of different heights and separation distances in a single process step. These results provide useful guidelines for controlling proximity effects during evolution of adjacent structures.

Keywords

nanostructurepolymerlithography (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1179: Symposium BB – Material Systems and Processes for Three-Dimentional Micro-and Nanoscale Fabrication and Lithography , 2009 , 1179-BB08-02
Copyright
Copyright © Materials Research Society 2009

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References

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