Hostname: page-component-5c6d5d7d68-txr5j Total loading time: 0 Render date: 2024-08-21T03:49:48.147Z Has data issue: false hasContentIssue false
  • English
  • Français

Thermal Stability Study of Oxygen Implanted Algaas/Gaas Single Quantum Well Structures Using PhotoreflectancE

Published online by Cambridge University Press:  21 February 2011

P J Hughes ,
E H Li ,
B L Weiss ,
H E Jackson  and
J S Roberts
P J Hughes
Affiliation:
Department of Electronic & Electrical Engineering, University of Surrey, Guildford, SURREY GU2 5XH, UK
E H Li
Affiliation:
Department of Electronic & Electrical Engineering, University of Surrey, SURREY GU2 5XH, UK
B L Weiss
Affiliation:
Department of Electronic & Electrical Engineering, University of Surrey, Guildford, SURREY GU2 5XH, UK
H E Jackson
Affiliation:
Department of Physics, University of Cincinnati Cincinnati, OHIO, 45220-0011, USA
J S Roberts
Affiliation:
Department of Electronic & Electrical Engineering, University of Sheffield, Sheffield, SI 3JD, UK
Get access

Abstract

The effects of interdiffusion on the band structure of two MxGaUxAs/GaAs single quantum well (SQW) structures were studied using room temperature photoreflectance. Rapid thermal annealing of the SQW structures at temperatures of 800°C, 900°C and 1000°C for times up to 180 seconds resulted in limited interdiffusion. Low dose (1014 cm”2) oxygen implantation reduced the thermal stability of these structures where the extent of the interdiffusion was found to be greater for the implanted samples for identical annealing conditions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 331
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Okamoto, H, Jap J Appi Phys, 26, 315, 1987 Google Scholar
2 Ghisoni, M et al. , Mat Res Soc Symp Proc, 262, 823, 1993 Google Scholar
3 Weiss, B L, Bradley, I V, Whitehead, N J and Roberts, J S, J Appi Phys, 71, 5715, 1992 Google Scholar
4 Koteles, E S et al. , Opt & Quantum Elect, 23, S779, 1991 Google Scholar
5 Stringfellow, G B and Horn, G, Appi. Phys. Lett. 34, 794, 1979 Google Scholar
6 Bryan, R P et al. , Appi Phys 55, 94, 1989 Google Scholar
7 Glembocki, O J, Proc SPIE, 1286, 2, 1990 Google Scholar
8 Hughes, P J, Hosea, T J C and Weiss, B L, submitted to J Appi PhysGoogle Scholar
9 Hughes, P J, Weiss, B L, Hosea, T J C, submittd to J Appi PhysGoogle Scholar
10 Hughes, P J, Weiss, B L, submitted to Appi Phys LettGoogle Scholar
11 SUSPRE is a computer code developed by R P Webb, University of Surrey for VG IONEXGoogle Scholar