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Thermal Spike Related Nonlinear Effects in Ion Beam Mixing at Low Temperatures

Published online by Cambridge University Press:  25 February 2011

G-S. Chen ,
D. Farkas  and
M. Rangaswamy
G-S. Chen
Affiliation:
Department of Materials Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061, USA
D. Farkas
Affiliation:
Department of Materials Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061, USA
M. Rangaswamy
Affiliation:
Department of Materials Engineering, Virginia Polytechnic Institute and State University, Blacksburg, Virginia 24061, USA
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Abstract

A semi-empirical model for ion mixing at low temperatures was developed taking into account collisional mixing and thermal spike effects, as well as the thermal spike shape. The collisional mixing part was accounted for by the Kinchin-Pease model, or, alternatively dynamic Monte Carlo simulation. For the thermal spike, the ion beam mixing parameter Dt/Φ is derived as being proportional to χ2+μ, where the damage parameter is defined as, χ = − F0/ΔHcoh, F0 is the damage energy deposited per unit path length, and μ is a constant dependent on the thermal spike shape and point defect density in the thermal spike regions. The shape of the thermal spike that best fit the experimental results depends on the magnitude of the cascade density. For relatively high density collisional cascades, where thermal spikes start to be important, it was found that a spherical thermal spike model was more consistent with experimental measurements at low temperatures. However, for extremely high density collisional cascade regions, a cylindrical thermal spike gave better results. Finally, three different regions of ion beam induced mixing were recognized according to different density levels of damage energy scaled by the damage parameter χ.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 128: Symposium A – Processing and Characterization of Materials Using Ion Beams , 1988 , 195
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

1. Winterbon, K. B., Ion Implantation Range and Energy Deposition Distributions, Vol. 2 (Plenum, New York, 1975).CrossRefGoogle Scholar
2. Andersen, H. H., Appl. Phys. 18, 131 (1979).CrossRefGoogle Scholar
3. Sigmund, P. and Gras-Marti, A., Nucl. Instr. & Meth. 182/183, 25 (1981).CrossRefGoogle Scholar
4. Pasianot, R., Farkas, Diana, Rangaswamy, M., and Savino, E. J., to be published.Google Scholar
5. Biersack, J. P. and Haggmark, L. G., Nucl. Instr. & Meth. 174, 257 (1980).CrossRefGoogle Scholar
6. Matteson, S., Roth, J. and Nicolet, M-A., Radiation Effects 42, 217 (1979).CrossRefGoogle Scholar
7. Li, S. Wen-Zhi, Kheyrandish, H., Al-Tamimi, Z. and Grant, W. A., Nucl. Instr. & Meth. B19/20, 723 (1987).CrossRefGoogle Scholar
8. Averback, R. S., Nucl. Instr. & Meth. B15, 675 (1986).CrossRefGoogle Scholar
9. Paine, B. M. and Averback, R. S., Nucl. Instr. & Meth. B7/8, 666 (1985).CrossRefGoogle Scholar
10. Johnson, W. L., Cheng, Y. T., Rossum, M. Van and Nicolet, M-A., Nucl. Instr. & Meth. B7/8, 657 (1985).CrossRefGoogle Scholar
11. Seitz, F. and Koehler, J. S., Solid State Physics 2, 251 (1956).Google Scholar
12. Vineyard, G. H., Radiation Effects 29, 245 (1976).CrossRefGoogle Scholar
13. Rubia, T. Diaz de, Averback, R. S., Benedek, R., and King, W. E., Phy. Rev. Lett. 59 (17), 1930 (1987).CrossRefGoogle Scholar
14. Ziegler, J. F., Biersack, J. P. and Littmark, U., The Stopping and Range of Ion in Solids, Vol.1, 1985, p.115–116.Google Scholar
15. Fenn-Tye, I. A. and Marwick, A. D., Nucl. Instr. & Meth. B18, 236 (1987).Google Scholar
16. Bottiger, J., Nielsen, S. K. and Thorsen, P. T., Nucl. Instr. & Meth. B7/8, 707 (1985).CrossRefGoogle Scholar
17. Rossum, M. Van, Cheng, Y-T., Nicolet, M-A. and Johnson, W. L., Appl. Phys. Lett. 46 (6), 610 (1985).CrossRefGoogle Scholar
18. Workman, T. W., Cheng, Y. T., Johnson, W. L. and Nicolet, M-A., Appl. Phys. Lett. 50 (21), 1485 (1987).CrossRefGoogle Scholar
19. Thompson, D. A. and Walker, R. S., Rad. Effects 36, 91 (1978).CrossRefGoogle Scholar
20. Heinisch, H. L., J. Nucl. Mater. 103/104, 1325 (1981).CrossRefGoogle Scholar