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Thermal and Photon-Induced Chemistry of Adsorbed Cadmium and Tellurium Alkyls

Published online by Cambridge University Press:  26 February 2011

C.D. Stinespring  and
A. Freedman
C.D. Stinespring
Affiliation:
Center for Chemical and Environmental Physics, Aerodyne Research, Inc., 45 Manning Road, Billerica, MA 01821
A. Freedman
Affiliation:
Center for Chemical and Environmental Physics, Aerodyne Research, Inc., 45 Manning Road, Billerica, MA 01821
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Abstract

Experimental studies of the thermal and photon-induced surface chemistry of two organometallic molecules, dimethyl cadmium and dimethyl tellurium, are reported for a variety of surfaces including Au, GaAs, Si, and SiO£. These studies followed ultrahigh vacuum compatible procedures and used x-ray photoelectron spectroscopy to characterize the chemical state and coverage of the adspecies formed at 295 K. The results showed considerable diversity in the thermal surface chemistry of the systems investigated. Depending on the substrate, physisorption and dissociative chemisorption to yield monomethyl and metal adspecies were observed. Irradiation of the physisorbed adspecies with 193 nm UV photons led to single photon photodecomposition and limited photodesorption. Similar irradiation of the monomethyl-adspecies caused only limited photodesorption.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 331
Copyright
Copyright © Materials Research Society 1998

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References

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