Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-29T07:49:41.970Z Has data issue: false hasContentIssue false

Texture Evolution During Crystallization Of Thin Amorphous Films

Published online by Cambridge University Press:  11 February 2011

Q.K.K. Liu
Affiliation:
Hahn-Meitner-Institut Berlin, Glienicker Straβe 100, D-14109, Berlin
G. Schumacher
Affiliation:
Hahn-Meitner-Institut Berlin, Glienicker Straβe 100, D-14109, Berlin
Get access

Abstract

Stress and energy distributions for crystallization of a thin amorphous film are calculated by means of 3D finite element method. The changes in energy are caused by elastic strain induced by different thermal expansion of the film and the substrate and by different mass densities of the crystal and the surrounding amorphous matrix. The calculations were performed for cubic crystal structure and for disc shaped crystals. Three crystal orientations (001), (011) and (111) were considered. Based on strain energy considerations the (001) orientation of crystals with respect to the film plane is energetically more favorable than (011) and (111) orientations. Interfacial and surface energies are certain to play a part in these effects as well.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Harris, V.G., Oliver, S.A., Ayers, J.D., Das, B.N. and Koon, N.C., Appl. Phys. Lett. 68, 2073 (1996).Google Scholar
2. Sanchez, F.H., Zhang, Y.D. and Budnick, J.I., Phys. Rev. B 38, 8508 (1988).Google Scholar
3. Ikari, T., Izahi, M., Fukumori, T., and Futagami, K., J. Mater Sci., 26, 583 (1991).Google Scholar
4. Carlotti, G., Doucet, L., and Dupeux, M., Thin Solid Films 296, 102 (1997).Google Scholar
5. Chen, H.S., J. Appl. Phys. 49, 3289 (1978).Google Scholar