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The Ternary Phase Diagram for Au-Ga-As Using the Flow Chart Technique
Published online by Cambridge University Press: 25 February 2011
Abstract
Degradation of the Au/GaAs interface during heating is a problem which limits device reliability. The “flow chart” method was used to construct the ternary Au-Ga-As phase diagram and determine the equilibrium reactions which are responsible for interfacial degradation. Interfacial degradation was correlated with the removal of Asx from the interface, which lowered the liquidus temperature and enhanced the dissolution of GaAs. The dissolution proceeds by a series of class II reactions within the Au-AuGa-GaAs ternary system and results in the incorporation of Ga into the Au phase, and growth of several AuxGay phases. However, when the processing is accomplished in a manner which prevents the interface from being depleted in As, no interfacial degradation is expected.
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- Copyright © Materials Research Society 1992
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