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Tensile Properties of Amorphous Diamond Films

Published online by Cambridge University Press:  10 February 2011

D.A. LaVan ,
R.J. Hohlfelder ,
J.P. Sullivan ,
T.A. Friedmann ,
M. Mitchell  and
C.I.H. Ashby
D.A. LaVan
Affiliation:
Sandia National Labs, Albuquerque, NM 87185, [email protected]
R.J. Hohlfelder
Affiliation:
Sandia National Labs, Albuquerque, NM 87185
J.P. Sullivan
Affiliation:
Sandia National Labs, Albuquerque, NM 87185
T.A. Friedmann
Affiliation:
Sandia National Labs, Albuquerque, NM 87185
M. Mitchell
Affiliation:
Sandia National Labs, Albuquerque, NM 87185
C.I.H. Ashby
Affiliation:
Sandia National Labs, Albuquerque, NM 87185
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Abstract

Amorphous diamond is a new material for surface micromachined microelectromechanical systems (MEMS) and sensors. Its strength and modulus was tested in uniaxial tension by pulling laterally on a specially designed sample with a flat tipped diamond in a nanoindenter. Several sample designs were attempted. Of those, only the single layer specimen with a 1 by 2 μm gage cross section and a fixed end rigidly attached to the substrate was successful. Tensile load was calculated by resolving the measured lateral and normal forces into the applied tensile force and frictional losses. Displacement was corrected for machine compliance using the differential stiffness method. Post-mortem examination of the samples was performed to document the failure mode. The load-displacement data from those samples that failed in the gage section was converted to stress-strain curves using carefully measured gage cross section dimensions. Mean fracture strength was found to be 8.5 ± 1.4 GPa and the modulus was 831 ± 94 GPa. Tensile results are compared to hardness and modulus measurements made using a nanoindenter

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 593: Symposium U – Amorphous & Nanostructured Carbon , 1999 , 465
Copyright
Copyright © Materials Research Society 2000

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References

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