Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-16T14:58:03.090Z Has data issue: false hasContentIssue false
  • English
  • Français

Temperature Distributions in CW Laser Induced Pyrolytic Deposition

Published online by Cambridge University Press:  21 February 2011

Klaus Piglmayer ,
Josef Doppelbauer  and
Dieter BÄuerle
Klaus Piglmayer
Affiliation:
Angewandte Physik, Johannes Kepler Universität, A-4040 Linz, Austria
Josef Doppelbauer
Affiliation:
Angewandte Physik, Johannes Kepler Universität, A-4040 Linz, Austria
Dieter BÄuerle
Affiliation:
Angewandte Physik, Johannes Kepler Universität, A-4040 Linz, Austria
Get access

Abstract

Temperature distributions induced by cw laser radiation absorbed on the surface of combined structures, consisting of discs or of stripes on semi - infinite plane substrates, are calculated for different material parameters and different geometries. The relevance of the numerical results is demonstrated by comparison with earlier experimental data obtained in pyrolytic laser-induced chemical vapor deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 29: Symposium I – Laser-Controlled Chemical Processing of Surfaces , 1983 , 47
Copyright
Copyright © Materials Research Society 1984

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Bäuerle, D., Mat. Res. Soc. Symp. Proc. Vol. 17 (Elsevier, New York 1983) pp. 19–28;Google Scholar
1a and Springer Series on Chemical Physics Vol. 33 (Springer, Heidelberg 1983) pp. 178–188 Google Scholar
2. Leyendecker, G., Bäuerle, D., Geittner, P. and Lydtin, H., Appl. Phys. Lett. 39, 921 (1981)Google Scholar
3. Bäuerle, D., Irsigler, P., Leyendecker, G., Noll, H. and Wagner, D., Appl. Phys. Lett. 40, 819 (1982)Google Scholar
4. Herman, J.P., Hyde, R.A., McWilliams, B.M., Weisberg, A.H. and Wood, L.L., Mat. Res. Soc. Symp. Proc. Vol. 17 (Elsevier, New York 1983) pp.Google Scholar
5. Moody, J.E. and Hendel, R.H., J. Appl. Phys. 53, 4364 (1982)Google Scholar
6. Calder, I.E. and Sue, R., J. Appl. Phys. 53, 7545 (1982)Google Scholar
7. Leyendecker, G., Noll, H., Bäuerle, D., Geittner, P. and Lydtin, H., J. Electrochem. Soc. 130, 157 (1983)Google Scholar
8. Gold, R.B. and Gibbons, J.F., J. Appl. Phys. 51, 1256 (1980)CrossRefGoogle Scholar
9. Davies, A.J., The Finite Element Method (Clarendon Press, Oxford 1980)Google Scholar
10. Dusinberre, G.M., Heat Transfer Calculations by Finite Differences (International Textbook, Scranton PA 1961)Google Scholar
11. Lax, M., J. Appl. Phys. 48, 3919 (1977)CrossRefGoogle Scholar
12. Carlton, H.E., Oxley, J.H., AIChE Journal 12, 86 (1977)Google Scholar
13. Kräuter, W., Bäuerle, D. and Fimberger, F., Appl. Phys. A 31, 13 (1983)Google Scholar
14. Szikora, S., Petzoldt, F. and Bäuerle, D., to be publishedGoogle Scholar