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Temperature and Flux dependence of ion induced ripple: a way to study defect and relaxation kinetics during ion bombardment

Published online by Cambridge University Press:  01 February 2011

Wai Lun Chan
Wai Lun Chan*
Affiliation:
Eric Chason Division of Engineering, Brown University Providence, RI02912.
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Abstract

We have measured the temperature and ion flux dependence of the ripple wavelength on a Cu(001) surface during low energy ion sputtering. We analyze these results in terms of a linear instability model and identify different experimentally observed behavior with different mechanisms of relaxation and surface defect kinetics. In a high temperature regime, diffusing species on the surface are mainly thermally induced while in a lower temperature range, the diffusing species are ion beam induced. At even lower temperature, thermal diffusion is deactivated and the surface relaxes through an athermal mechanism. We define a transition between different defects formation kinetics in temperature and flux phase space and discuss how the defect kinetics model can be extended to different materials system.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 849: Symposium KK – Kinetics-Driven Nanopatterning on Surfaces , 2004 , KK6.8
Copyright
Copyright © Materials Research Society 2005

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References

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