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Tem Study of Diamond Films Grown from Fullerene Precursors

Published online by Cambridge University Press:  15 February 2011

R. Csencsitsi ,
D. M. Gruen ,
A. R. Krauss  and
C. Zuiker
R. Csencsitsi
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, [email protected]
D. M. Gruen
Affiliation:
Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, Illinois 60439
A. R. Krauss
Affiliation:
Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, Illinois 60439
C. Zuiker
Affiliation:
Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, Illinois 60439
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Abstract

Transmission Electron Microscope (TEM) techniques are applied to study the microstructure of diamond films grown from fullerene precursors. Electron diffraction and electron energy loss spectra (EELS) collected from the diamond films correspond to that of bulk diamond. Microdiffraction, high resolution images and EELS help determine that the first diamond grains that nucleate from fullerene precursors generally form on a thin amorphous carbon nterlayer and seldom directly on the silicon substrate. Grain size measurements reveal nanocrystalline diamond grains. Cross section TEM images show that the nanocrystalline diamond grains are equiaxed and not columnar nor dendritic. The microstructure of small equiaxed grains throughout the film thickness is believed responsible for the very smooth surfaces of diamond films grown from fullerene precursors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 291
Copyright
Copyright © Materials Research Society 1996

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References

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