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Tem Investigation of the Microstructure in Laser-Crystallized Ge Films
Published online by Cambridge University Press: 15 February 2011
Abstract
The crystallite morphology and defect structure of laser-crystallized Ge films have been characterized by transmission (TEM) and scanning (SEM) electron microscopy. The elongated crystallites present in these films have their long axis in the [001] direction. In regions where these crystallites are well aligned with each other, competitive lateral growth and (110) texture are observed. The defects most frequently found are [111] microtwins. A growth model that accounts for the texture and defects is proposed.
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