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Technology for Microassembling

Published online by Cambridge University Press:  15 February 2011

S. Johansson
S. Johansson*
Affiliation:
Department of Technology, Uppsala University, Box 534, 751 21 Uppsala, Sweden, [email protected]
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Abstract

The various problem areas regarding assembling of microelements into complex microsystems are reviewed and the joining techniques are emphasised in particular. The dis,-ussion is focused on the fabrication of microrobotic systems and the various joining techniques are compared with respect to the potential of fulfilling the demands for such a process. Factor.; such as processing conditions, precision, stability, materials limitations, bond and device strength are included in the comparison. Different methods for handling and manipulating microelements are discussed and the experimental equipment used in our own investigations is presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 3
Copyright
Copyright © Materials Research Society 1997

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