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Techniques for Characterising Artificial Layer Structures using Transmission Electron Microscopy

Published online by Cambridge University Press:  25 February 2011

W. M. Stobbs
W. M. Stobbs*
Affiliation:
Cambridge University, Dept. of Materials Science and Metallurgy, Pembroke Street, Cambridge CB2 3QZ, United Kingdom.
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Abstract

T.E.M. methods are described for the quantitative characterisation of the compositional and structural changes at interfaces and in homo- and hetero-phase multilayer structures. Many of the newer approaches described including the Fresnel and Centre Stop Dark Field Imaging Methods were developed specifically for such characterisations. The range of applications of each of the techniques is assessed as is the importance of delineating the limiting effects of inelastic and inelastic/elastic multiple scattering.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 103 , 1987 , 121
Copyright
Copyright © Materials Research Society 1988

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References

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