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A Systematic Method for Extracting Structural Parameters from Low Angle X-Ray Reflectivity Measurements on Multilayers

Published online by Cambridge University Press:  28 February 2011

L.M. Goldman ,
H.A. Atwater  and
F. Spaepen
L.M. Goldman
Affiliation:
Harvard University, Division of Applied Sciences Cambridge, MA 02138
F. Spaepen
Affiliation:
Harvard University, Division of Applied Sciences Cambridge, MA 02138
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Abstract

X-ray diffraction is one of the main methods of determining the structure of multilayers. Low angle reflectivity measurements are particulary useful for multilayers containing polycrystalline or amorphous constituents, and for obtaining specific structural data. We present a method based on both kinematic and dynamic scattering calculations, and use it to extract specific structural parameters such as the roughness or diffuseness of the external surface, the thickness of the constituent layers, and the roughness or diffuseness of the internal interfaces. Results are given for a sputtered A1/A12O3 multilayer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 160 , 1989 , 577
Copyright
Copyright © Materials Research Society 1990

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References

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