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Synthesis and Dispersion of Ultra-Small Binary and Ternary Metal Oxide Nanoparticles for Dielectric Thin Films

Published online by Cambridge University Press:  03 March 2011

Tarik A. Cheema ,
Dan Taroata ,
Guenter Schmid  and
Georg Garnweitner
Tarik A. Cheema
Affiliation:
Technische Universität Braunschweig, Institute of Particle Technology Volkmaroder Str. 5, 38104 Braunschweig, Germany
Dan Taroata
Affiliation:
Siemens AG, Corporate Technology - Global Technology Field Organic Electronics Guenter-Scharowsky-Str. 1, 91054 Erlangen, Germany Technische Universität Dresden, Institute for Semiconductor and Microsystems Technology 01062 Dresden, Germany
Guenter Schmid
Affiliation:
Siemens AG, Corporate Technology - Global Technology Field Organic Electronics Guenter-Scharowsky-Str. 1, 91054 Erlangen, Germany
Georg Garnweitner
Affiliation:
Technische Universität Braunschweig, Institute of Particle Technology Volkmaroder Str. 5, 38104 Braunschweig, Germany
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Abstract

Fabrication of dielectric thin films using dispersions of ultra-small ZrO2 and BaTiO3 nanoparticles with a low-temperature processing is reported. Highly crystalline and monodisperse cubic-ZrO2 and tetragonal-BaTiO3 nanoparticles were synthesized using non-aqueous approach. Post synthesis, nanoparticle dispersions were realized through chemical modification of their surface. The obtained dispersions were then employed for the fabrication of homogeneous and densely-packed dielectric thin films, verified through scanning electron microscopy.

Keywords

dielectricnanostructurethin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1303: Symposium Y – Nanomaterials Integration for Electronics, Energy and Sensing , 2011 , mrsf10-1303-y14-05
Copyright
Copyright © Materials Research Society 2011

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References

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