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Synthesis and Characterization of Titania and Vanadia Thin Films at Organic Self-Assembled Monolayers

Published online by Cambridge University Press:  10 February 2011

T. P. Niesen
Affiliation:
Max-Planck-Institut für Metallforschung and Institut für Nichtmetallische Anorganische Materialien, Universität Stuttgart, Pulvermetallurgisches Laboratorium, Heisenbergstr. 5, Stuttgart, Germany, [email protected]
J. Wolff
Affiliation:
Max-Planck-Institut für Metallforschung and Institut für Nichtmetallische Anorganische Materialien, Universität Stuttgart, Pulvermetallurgisches Laboratorium, Heisenbergstr. 5, Stuttgart, Germany, [email protected]
J. Bill
Affiliation:
Max-Planck-Institut für Metallforschung and Institut für Nichtmetallische Anorganische Materialien, Universität Stuttgart, Pulvermetallurgisches Laboratorium, Heisenbergstr. 5, Stuttgart, Germany, [email protected]
M. R. De Guire
Affiliation:
Department of Materials Science & Engineering, Case Western Reserve University, 10900 Euclid Avenue, Cleveland, Ohio 44106–7204, USA
F. Aldinger
Affiliation:
Max-Planck-Institut für Metallforschung and Institut für Nichtmetallische Anorganische Materialien, Universität Stuttgart, Pulvermetallurgisches Laboratorium, Heisenbergstr. 5, Stuttgart, Germany, [email protected]
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Abstract

Functionalized self-assembled monolayers (SAMs) on single-crystal Si wafers have been used as substrates for the deposition of titania and vanadia thin films. The formation of a titanium chelate was used to stabilize an otherwise spontaneously precipitating aqueous titanium solution. Uniform titania films have been synthesized from Ti(O2)2+ in aqueous HCl solutions at 80°C on sulfonated SAMs. Vanadium oxide hydrate films, V2O5·0.7 H2O, have been directly formed from aqueous vanadate solutions on NH2-terminated SAMs at 45°C. In the as-deposited films, water molecules were intercalated between the vanadium oxide layers. Subsequent annealing at 350°C in air led to nanocrystalline V2O5.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

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References

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