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Synthesis and Characterization of Nitrogen Containing Diamondlike Carbon Films made by ion Beam Deposition

Published online by Cambridge University Press:  22 February 2011

Jeansong Shiao ,
Christian A. Zorman  and
Richard W. Hoffman
Jeansong Shiao*
Affiliation:
Department of Physics, Case Western Reserve University, Cleveland, OH 44106
Christian A. Zorman
Affiliation:
Department of Physics, Case Western Reserve University, Cleveland, OH 44106
Richard W. Hoffman
Affiliation:
Department of Physics, Case Western Reserve University, Cleveland, OH 44106
*
Author to whom correspondence should be addressed. Current address: 5031 N. Sedgewick Road, Lyndhurst, OH 44124, USA.
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Abstract

Hydrogenated and nonhydrogenated nitrogen containing diamondlike carbon films (NDLC including a-C:N and a-C:N:H) were made in a dual ion beam deposition system. The asdeposited films were characterized by Raman spectroscopy, Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERD). The compositional stability of the films at temperatures up to 550°C was examined in situ by both RBS and ERD using a heated sample stage in the scattering chamber. The addition of nitrogen altered the Raman parameters when compared with conventional DLC. At elevated temperatures, the a-C:N films do not suffer nitrogen loss; however, the a-C:N:H films undergo nitrogen and hydrogen loss at 400°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 349: Symposium T – Novel Forms of Carbon II , 1994 , 465
Copyright
Copyright © Materials Research Society 1994

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References

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