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Surface Synthesis Via Laser-Liquid Reactions

Published online by Cambridge University Press:  26 February 2011

Julian P. Partridge  and
Peter R. Strutt
Julian P. Partridge
Affiliation:
The University of Connecticut, Institute of Materials Science and Department of Metallurgy, Box U-136, Storrs, CT 06268.
Peter R. Strutt
Affiliation:
The University of Connecticut, Institute of Materials Science and Department of Metallurgy, Box U-136, Storrs, CT 06268.
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Abstract

The phenomena occurring when laser radiation interacts with a material submerged in a liquid depend on the power, wavelength, pulse duration, and liquid dielectric properties. Present studies, involving two distinctly different physical situations, show how some interaction modes can be used for surface modification. In the first, a continuouswave CO2 laser-beam progressively pyrolyzes a liquid precursor to form a surface coating. Hexamethylcyclotrisilazane, for example, dissociates to produce highly adherent Si3N4 layers containing 200nm spherical particles. In the second physical situation, intense excimer laser radiation produces dielectric breakdown of the liquid, thus creating a high-temperature plasma and a high-pressure shock wave. Under these conditions, precursor decomposition products alloy the substrate to a depth of lum. Experiments above and below the substrate melt threshold have been used to determine the effects of processing in different power density regimes. A variety of analytical techniques have been employed to determine the compositions of the as-synthesised layers and mechanisms related to the observed phenomena are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 443
Copyright
Copyright © Materials Research Society 1998

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References

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