Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-25T17:57:20.912Z Has data issue: false hasContentIssue false
  • English
  • Français

Surface Roughness Characterization of al Films by Spectroscopic Ellipsometry

Published online by Cambridge University Press:  26 February 2011

J. R. Blanco ,
K. Vedam ,
P. J. McMarr  and
J. M. Bennett
J. R. Blanco
Affiliation:
Materials Research Laboratory, The Pennsylvania State university, University Park, PA 16802;
K. Vedam
Affiliation:
Materials Research Laboratory, The Pennsylvania State university, University Park, PA 16802;
P. J. McMarr
Affiliation:
Materials Research Laboratory, The Pennsylvania State university, University Park, PA 16802;
J. M. Bennett
Affiliation:
Michelson Laboratory, U.S.Naval Weapons Center, China Lake, CA 93555
Get access

Abstract

Well characterized rough surfaces of aluminum films have been studied by the nondestructive technique of Spectroscopie Ellipsometry (SE). The roughness of the aluminum specimens had been characterized earlier by Total Integrated Scattering and Stylus Profilometry techniques to obtain numerical estimates of ras roughness and autocovariance lengths. The present SE measurements on these specimens were carried out at a number of angles of incidence in the range 30–80° and at a number of discrete wavelengths in the spectral range 300–650nm. The SE results were then analyzed by the scalar theory of diffraction from random rough surfaces by treating the surface as a simple random rough surface. The results of such analyses of the SE measurements are compared with the results of the earlier characterization techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 54: Symposium E – Thin Films–Interfaces and Phenomena , 1985 , 669
Copyright
Copyright © Materials Research Society 1986

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Bennett, J.M., Opt. News 11 (7), 17 (1985).Google Scholar
2. Bennett, J.M., Appl. Opt. 24 3766 (1985).Google Scholar
3. Peklenik, J., Proc. IME 182, 108 (1967-1968).Google Scholar
4. Thomas, R.E., Precision Eng. 3, 97 (1981).Google Scholar
5. King, T.G. and Spedding, T.A., Precision Eng. 5, 153 (1983).Google Scholar
6. Guenther, K.H., Wierer, P.G. and Bennett, J.M., Appl. Opt. 23, 3820 (1984).Google Scholar
7. Church, E.L., Proc. SPIE 511, 18 (1984).Google Scholar
8. Ohlídal, I. and Lukes, F., Opt. Acta 19 817 (1972).Google Scholar
9. Ohlidad, I. and Lukes, F., Opt. Commun. 5, 323 (1972).Google Scholar
10. Beekman, P. and Spizzichino, A., The Scattering of Electromagnetic Waves from Rough Surfaces (Pergamon, Oxford, 1963).Google Scholar
11. Blanco, J.R., McMarr, P.J. and Vedam, K., Appl. Opt. 24 3773 (1985).Google Scholar
12. Aspnes, D.E. and Studna, A.A., Appl. Opt. 14, 220 (1975).Google Scholar
13. Bennett, H.E., Opt. Eng. 17, 480 (1978);Google Scholar
Archibald, P.C. and Bennett, H.E., Opt. Eng. 17, 647 (1978).Google Scholar
14. Bennett, J.M. and Dancy, J.H., Appl. Opt. 20, 1785 (1981).Google Scholar
15. Blanco, J.R., Ph.D. Dissertation, The Pennsylvania State University (1985).Google Scholar
16. Church, E.L., Proc. SPIE 184; 196 (1979).Google Scholar
17. Elson, J.M. and Bennett, J.M., J. Opt. Soc. Am. 69, 31 (1979).Google Scholar
18. Church, E.L., Jenkinson, H.A. and Zavad, J.M.;, Opt. Eng. 18 125 (1979).Google Scholar
19. Blanco, J.R., McMarr, P.J., Vedam, K. and Bennett, J.M., Proceedings of the Symposium on Multiple Scattering of Waves in Ranom Media and Random Rough Surfaces, edited by Varadan, V.K. and Varadan, V.V. (The Pennsylvania State University, University Park, PA. in press).Google Scholar