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Surface Roughening and Composition Modulation of ZnSe-related II-VI epitaxial films

Published online by Cambridge University Press:  03 September 2012

Shigetaka Tomiya ,
Hironori Tsukamoto ,
Satoshi Itoh ,
Kazushi Nakano ,
Etsuo Morita  and
Akira Ishibashi
Shigetaka Tomiya
Affiliation:
Sony Corporation Research Center, 174, Fujitsuka Hodogaya, Yokohama, 240 Japan
Hironori Tsukamoto
Affiliation:
Sony Corporation Research Center, 174, Fujitsuka Hodogaya, Yokohama, 240 Japan
Satoshi Itoh
Affiliation:
Sony Corporation Research Center, 174, Fujitsuka Hodogaya, Yokohama, 240 Japan
Kazushi Nakano
Affiliation:
Sony Corporation Research Center, 174, Fujitsuka Hodogaya, Yokohama, 240 Japan
Etsuo Morita
Affiliation:
Sony Corporation Research Center, 174, Fujitsuka Hodogaya, Yokohama, 240 Japan
Akira Ishibashi
Affiliation:
Sony Corporation Research Center, 174, Fujitsuka Hodogaya, Yokohama, 240 Japan
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Abstract

We have investigated ZnSSe and ZnMgSSe epitaxial layers lattice-matched to GaAs (001) substrates grown by molecular beam epitaxy using atomic force microscopy and transmission electron microscopy. Under II-rich conditions with c(2x2) surface reconstruction, surface morphology exhibited corrugation aligned in the [1ī0] direction and composition modulation was observed in the same [1ī0] direction. Under VI-rich condition with (2x1) surface reconstruction, the surface morphology becomes rounded grain-like and composition modulation was not observed. The formation of composition modulation is associated with the surface corrugated structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 448: Symposium M – Control of Semiconductor Surfaces and Interfaces , 1996 , 159
Copyright
Copyright © Materials Research Society 1997

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