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Surface Reactions in the Decomposition of Zinc Alkyls on Si(100)-2×1 Surfaces

Published online by Cambridge University Press:  25 February 2011

M.A. Rueter  and
J.M. Vohs
M.A. Rueter
Affiliation:
Department of Chemical Engineering, University of Pennsylvania, Philadelphia, PA 19104
J.M. Vohs
Affiliation:
Department of Chemical Engineering, University of Pennsylvania, Philadelphia, PA 19104
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Abstract

The adsorption and reaction of dimethylzinc and diethylzinc on Si(100)-2×l surfaces was studied using temperature programmed desorption and high resolution electron energy loss spectroscopy. These zinc alkyls were found to dissociate at temperatures less than 300 K to produce adsorbed alkyl species and deposit zinc on the surface. During temperature programmed desorption zinc metal desorbed at 530 K leaving only alkyl species on the surface at higher temperatures. Surface methyl groups were found to decompose to carbon and hydrogen or desorb as methyl radicals, while surface ethyl groups underwent a series of surface reactions which resulted in three separate ethylene desorption peaks. The results of this study provide new insight into the reactions of group II metal alkyls on silicon surfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 403
Copyright
Copyright © Materials Research Society 1991

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References

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