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Surface and Interface Microstructure of Epitaxial Ferroelectric (Ba, Sr)Tio3 Thin Films

Published online by Cambridge University Press:  21 February 2011

V. A. Alyoshin ,
E. V. Sviridov ,
Vi. M. Mukhortov ,
I. N. Zakharchenko  and
V. P. Dudkevich
V. A. Alyoshin
Affiliation:
Institute of Physics, Rostov State University, 194 StachKi ave. Rostov-on-Don, 344104 Russia
E. V. Sviridov
Affiliation:
Institute of Physics, Rostov State University, 194 StachKi ave. Rostov-on-Don, 344104 Russia
Vi. M. Mukhortov
Affiliation:
Institute of Physics, Rostov State University, 194 StachKi ave. Rostov-on-Don, 344104 Russia
I. N. Zakharchenko
Affiliation:
Institute of Physics, Rostov State University, 194 StachKi ave. Rostov-on-Don, 344104 Russia
V. P. Dudkevich
Affiliation:
Institute of Physics, Rostov State University, 194 StachKi ave. Rostov-on-Don, 344104 Russia
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Abstract

Surface and cross-section relief evolution of ferroelectric epitaxial (Ba,Sr)Ti03 films rf-sputtered on (001) MgO crystal cleavage surfaces versus the oxygen worKing gas pressure P and substrate temperature T were studied. Specific features of both three-dimensional and two-dimensional epitaxy mechanisms corresponding to various deposition conditions were revealed. Difference between low and high P-T-value 3D epitaxy was established. the deposition of films with mirror-smooth surfaces and perfect interfaces is shown to be possible.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 388: Symposium Q – Film Synthesis and Growth Using Energetic Beams , 1995 , 411
Copyright
Copyright © Materials Research Society 1995

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References

1 SurowiaK, Z., NiKitin, Y., BiryuKov, S., GolovKo, Y., MuKhortov, V. and DudKevich, V., Thin Solid Films. 208, 76 (1992).Google Scholar