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Submicron displacement measurements of MEMS using optical microphotographs in aqueous media: Enhancement using color image processing
Published online by Cambridge University Press: 15 January 2014
Abstract
The measurement of precise submicron displacements is essential in several MEMS applications. For instance, the measurement of the mechanical parameters of biological cells requires repeatable measurement of displacements in the nanometer regime. This paper presents a method to make displacement measurements in an aqueous MEMS environment with a ± 10 nm accuracy by using the blue channel of RGB pictures in combination with a FFT phase shift analysis.
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- Copyright © Materials Research Society 2014
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