Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-23T03:21:29.663Z Has data issue: false hasContentIssue false
  • English
  • Français

Submicron displacement measurements of MEMS using optical microphotographs in aqueous media: Enhancement using color image processing

Published online by Cambridge University Press:  15 January 2014

Stephan Warnat ,
Hunter King ,
Rachael Schwartz ,
Marek Kujath  and
Ted Hubbard
Stephan Warnat
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Hunter King
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Rachael Schwartz
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Marek Kujath
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Ted Hubbard
Affiliation:
Dalhousie University, Mechanical Engineering Department, 1360 Barrington St. Halifax, NS B3J 1Z1, Canada.
Get access

Abstract

The measurement of precise submicron displacements is essential in several MEMS applications. For instance, the measurement of the mechanical parameters of biological cells requires repeatable measurement of displacements in the nanometer regime. This paper presents a method to make displacement measurements in an aqueous MEMS environment with a ± 10 nm accuracy by using the blue channel of RGB pictures in combination with a FFT phase shift analysis.

Keywords

microelectro-mechanical (MEMS)actuatorbiomedical
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1659: Symposium SS/XX – Micro- and Nanoscale Systems – Novel Materials, Structures and Devices , 2014 , pp. 43 - 48
Copyright
Copyright © Materials Research Society 2014 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Hecht, E., Optics, 3rd ed (Addison Wessley, Reading, 1998), p. 416.Google Scholar
Arthur, C., Ellerington, N., Hubbard, T. and Kujath, M.. J. Micromech. and Microeng. 21(3), 35022 (2011).CrossRefGoogle Scholar
Yamahata, C., Sarajilic, E., Krijnen, J.M and Gijsal, M.A.M., J. Micromechanical Sys. 19(5), 1273–1275 (2010).CrossRefGoogle Scholar
Carter, J., PolyMUMPs Design Handbook: a Mumps (R) process, 11th ed (MEMSCAP Inc, 2005).Google Scholar
Warnat, S., Schwartz, R., Hubbard, T. and Kujath, M. in 24th Canadian Congress of Applied Mechanics, edited by Summer, D., (Saskatoon 2013), pp. ME-49.Google Scholar
Hickey, R., Sameoto, D., Hubbard, T. and Kujath, M., J. Micromech. and Microeng., 13(1), 40 (2003).CrossRefGoogle Scholar
Sameoto, D., Hubbard, T. and Kujath, M., J. Micromech. and Microeng., 14(10), 1359, (2004).CrossRefGoogle Scholar
Pope, R.M. and Fry, E.S., Applied Optics, 36(33), 8710 (1997).CrossRefGoogle Scholar