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Sublimation Growth and Defect Characterization of AlN Single Crystals
Published online by Cambridge University Press: 01 February 2011
Abstract
In this paper, we report results from AlN single crystal growth experiments using a sublimation physical vapor transport growth technique. AlN single crystal boules up to 7mm in diameter were demonstrated. Characterization of polished AlN single crystal samples was carried out using various techniques, including synchrotron X-ray topography.
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- Copyright © Materials Research Society 2008