Hostname: page-component-cd9895bd7-jn8rn Total loading time: 0 Render date: 2024-12-27T02:28:56.691Z Has data issue: false hasContentIssue false
  • English
  • Français

A Study on Film Precursors in SiH4 Thermal CVD by use of Trench Coverage Measurements

Published online by Cambridge University Press:  25 February 2011

Akimasa Yuuki ,
Takaaki Kawahara ,
Yasuji Matsui  and
Kunihide Tachibana
Akimasa Yuuki
Affiliation:
Central Research Laboratory, Mitsubishi Electric Corp., Tsukaguchi Honmachi, Amagasaki, Hyogo 661, Japan
Takaaki Kawahara
Affiliation:
Central Research Laboratory, Mitsubishi Electric Corp., Tsukaguchi Honmachi, Amagasaki, Hyogo 661, Japan
Yasuji Matsui
Affiliation:
Central Research Laboratory, Mitsubishi Electric Corp., Tsukaguchi Honmachi, Amagasaki, Hyogo 661, Japan
Kunihide Tachibana
Affiliation:
Department of Electronics, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606, Japan
Get access

Abstract

The precursors of Si film in SiH4 low pressure thermal CVD are studied by use of the trench coverage analysis. The cross sectional profile of the film deposited in a trench is simulated by a direct Monte-Carlo method using the composition of the precursors and their sticking probabilities as adjustable parameters. A comparison with the experimental results[1] shows that the trench coverage profiles are well reproduced by the model where two kinds of precursors deposit independently with respective sticking probabilities of almost zero and unity. The former is silane molecule, and the latter is radicals produced by gas phase reactions. The deposition rate due to radicals can be estimated from the comparison. Considering the sticking probability and the SiH4 pyrolysis reactions, it is concluded that H3SiSiH is one of ate dominant film precursors in gas phase reaction products.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 146: Symposium B – Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing , 1989 , 121
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Morie, T., and Murota, J., J. Appl. Phys. L2, L482 (1984).Google Scholar
2. Yuuki, A., Matsui, Y., and Tachibana, K., Jpn. J. Appl. Phys. 26, 747 1987.Google Scholar
3. Purnell, J. H. and Walsh, R., Proc. Roy. Soc. 293, 543 1966.Google Scholar
4. White, R.T., Espino-Rios, R.L., Rogers, D.S., Ring, M.A., and O'Neal, H.E., Intrn. J. Chem. Kinetics 17, 1029 1985.Google Scholar
5. Buss, R.J., Ho, P., Breiland, W.G., Coltrin, M.E., J Appl Phys, 63, 2808 1988.CrossRefGoogle Scholar
6 Robertson, R. and Gallagher, A., J. Chem. Phys. 85, 3623 1986.CrossRefGoogle Scholar
7. Coltrin, M.E., Kee, R.J., Miller, J. A., J. Electrochem. Soc. 133, 1206 1986.Google Scholar
8. Yuuki, A., Matsui, Y., and Tachibana, K., to be published in Jpn. J. Appl. Phys. 28(2) (1989).Google Scholar
9. Nakayama, S., Yonezawa, H. and Murota, J., Jpn. J. Appl. Phys 23, 1493 1984.Google Scholar
10. Clark, A., The Theory of Adsorption and Catalysis (Academic Press, 1970).Google Scholar